LEADER 01874nam0 22004093i 450 001 VAN0219625 005 20230607093426.628 017 70$2N$a9789811509438 100 $a20210930d2019 |0itac50 ba 101 $aeng 102 $aSG 105 $a|||| ||||| 200 1 $aLaser Heat-Mode Lithography$ePrinciple and Methods$fJingsong Wei 210 $aSingapore$cSpringer$d2019 215 $axiii, 208 p.$cill.$d24 cm 410 1$1001VAN0023990$12001 $aSpringer series in materials science$1210 $aBerlin$cSpringer$v291 500 1$3VAN0219627$aLaser Heat-Mode Lithography : Principle and Methods$91873380 606 $a00A79 (77-XX)$xPhysics [MSC 2020]$3VANC023182$2MF 606 $a78A60$xLasers, masers, optical bistability, nonlinear optics [MSC 2020]$3VANC029030$2MF 606 $a74K35$xThin films [MSC 2020]$3VANC033952$2MF 606 $a74A50$xStructured surfaces and interfaces, coexistent phases [MSC 2020]$3VANC036162$2MF 610 $aArbitrary pattern writing$9KW:K 610 $aMaskless lithography$9KW:K 610 $aMetallo-organic compound$9KW:K 610 $aPhase change$9KW:K 610 $aThermal diffusion$9KW:K 620 $aSG$dSingapore$3VANL000061 700 1$aWei$bJingsong$3VANV107137$0792199 712 $aSpringer $3VANV108073$4650 801 $aIT$bSOL$c20240614$gRICA 856 4 $uhttp://doi.org/10.1007/978-981-15-0943-8$zE-book ? Accesso al full-text attraverso riconoscimento IP di Ateneo, proxy e/o Shibboleth 899 $aBIBLIOTECA DEL DIPARTIMENTO DI MATEMATICA E FISICA$1IT-CE0120$2VAN08 912 $fN 912 $aVAN0219625 950 $aBIBLIOTECA DEL DIPARTIMENTO DI MATEMATICA E FISICA$d08CONS e-book 4098 $e08eMF4098 20210930 996 $aLaser Heat-Mode Lithography : Principle and Methods$91873380 997 $aUNICAMPANIA