LEADER 01970nam0 22004933i 450 001 VAN0215448 005 20230606110515.507 017 70$2N$a9783030330736 100 $a20210922d2019 |0itac50 ba 101 $aeng 102 $aCH 105 $a|||| ||||| 200 1 $aDIY MEMS$eFabricating Microelectromechanical Systems in Open Use Labs$fDeborah Munro 210 $aCham$cSpringer$d2019 215 $axvi, 188 p.$cill.$d24 cm 500 1$3VAN0215451$aDIY MEMS : Fabricating Microelectromechanical Systems in Open Use Labs$91870349 606 $a00A79 (77-XX)$xPhysics [MSC 2020]$3VANC023182$2MF 606 $a94Cxx$xCircuits, networks [MSC 2020]$3VANC027151$2MF 610 $aActuators$9KW:K 610 $aBiomedical Engineering$9KW:K 610 $aCleanrooms$9KW:K 610 $aDIY$9KW:K 610 $aFabrication$9KW:K 610 $aLithography$9KW:K 610 $aMEMS$9KW:K 610 $aMEMS Packaging$9KW:K 610 $aMicroelectromechanical systems$9KW:K 610 $aMicrofabrication$9KW:K 610 $aNNCI$9KW:K 610 $aNanotechnology$9KW:K 610 $aNational Nanotechnology Infrastructure Network$9KW:K 610 $aOpen use labs$9KW:K 610 $aSoft materials$9KW:K 620 $aCH$dCham$3VANL001889 700 1$aMunro$bDeborah$3VANV184353$0837075 712 $aSpringer $3VANV108073$4650 801 $aIT$bSOL$c20240614$gRICA 856 4 $uhttp://doi.org/10.1007/978-3-030-33073-6$zE-book ? Accesso al full-text attraverso riconoscimento IP di Ateneo, proxy e/o Shibboleth 899 $aBIBLIOTECA DEL DIPARTIMENTO DI MATEMATICA E FISICA$1IT-CE0120$2VAN08 912 $fN 912 $aVAN0215448 950 $aBIBLIOTECA DEL DIPARTIMENTO DI MATEMATICA E FISICA$d08CONS e-book 3875 $e08eMF3875 20210922 996 $aDIY MEMS : Fabricating Microelectromechanical Systems in Open Use Labs$91870349 997 $aUNICAMPANIA