LEADER 01680nam0 2200349 i 450 
001 VAN0125711
005 20220311090019.282
017 70$2N$a9783319939254
100   $a20191203d2018       |0itac50      ba
101   $aeng
102   $aCH
105   $a||||    |||||
200 1 $aMetal Impurities in Silicon- and Germanium-Based Technologies$eOrigin, Characterization, Control, and Device Impact$fCor Claeys, Eddy Simoen
210   $aCham$cSpringer$d2018
215   $aXXXIII, 438 p.$cill.$d24 cm
410  1$1001VAN0023990$12001 $aSpringer series in materials science$1210  $aBerlin$cSpringer$v270
620   $aCH$dCham$3VANL001889
676   $a621.36$cIngegneria ottica. Ottica applicata$v22
676   $a620.1$cScienze dei materiali$v22
676   $a541.377$cSemiconduttori$v22
676   $a537.5344$cMicroonde e onde a frequenza ultraalta$v22
700  1$aClaeys$bCor$3VANV097129$0769287
701  1$aSimoen$bEddy$3VANV097130$0769288
712   $aSpringer <editore>$3VANV108073$4650
801   $aIT$bSOL$c20240614$gRICA
856 4 $uhttps://link.springer.com/book/10.1007/978-3-319-93925-4$zE-book - Accesso al full-text attraverso riconoscimento IP di Ateneo, proxy e/o Shibboleth
899   $aBIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHE$1IT-CE0101$2VAN17
912   $fN
912   $aVAN0125711
950   $aBIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHE$d17CONS      e-book                  2112        $e17BIB2112/261  261     20191203            
996   $aMetal Impurities in Silicon- and Germanium-Based Technologies$91568124
997   $aUNICAMPANIA