LEADER 01423nam0 2200349 i 450 
001 VAN0109793
005 20230313103505.919
010   $a978-36-624-4394-1
017 70$2N$a978-3-662-44395-8
100   $a20170608d2015       |0itac50      ba
101   $aeng
102   $aDE
105   $a||||    |||||
200 1 $aMicro and Nano Fabrication$eTools and Processes$f Hans H. Gatzen, Volker Saile, Jürg Leuthold$gwith a Foreward and an Introduction by Richard S. Muller
205   $aBerlin : Springer, 2015
210   $aXXVI$d519 p.$cill. ; 24 cm
215   
620   $dBerlin$3VANL000066
700  1$aGatzen$bHans H.$3VANV084967$0739924
701  1$aLeuthold$bJürg$3VANV084969$0739926
701  1$aSaile$bVolker$3VANV084968$0739925
702  1$aMuller$bRichard S.$3VANV026484
712   $aSpringer <editore>$3VANV108073$4650
790  1$aGarzen, H. H.$zGatzen, Hans H.$3VANV107670
801   $aIT$bSOL$c20240614$gRICA
856 4 $uhttps://link.springer.com/book/10.1007%2F978-3-662-44395-8$zE-book ? Accesso al full-text attraverso riconoscimento IP di Ateneo, proxy e/o Shibboleth
899   $aBIBLIOTECA CENTRO DI SERVIZIO SBA$2VAN15
912   $fN
912   $aVAN0109793
950   $aBIBLIOTECA CENTRO DI SERVIZIO SBA$d15CONS      SBA EBOOK 1386                      $e15EB 1386              20170608            
996   $aMicro and Nano Fabrication$91466147
997   $aUNICAMPANIA