LEADER 01152nam0 22002893i 450 
001 VAN00119624
005 20240806100804.921
017 70$2N$a978-3-319-20385-0
100   $a20190123d2016       |0itac50      ba
101   $aeng
102   $aCH
105   $a||||    |||||
200 1 $aDesign for Manufacturability with Advanced Lithography$fBei Yu, David Z. Pan
210   $aCham$cSpringer$d2016
215   $axi, 164 p.$d24 cm
620   $aCH$dCham$3VANL001889
700  1$aYu$bBei$3VANV091871$0788068
701  1$aPan$bDavid Z.$3VANV091872$0788069
712   $aSpringer <editore>$3VANV108073$4650
801   $aIT$bSOL$c20240906$gRICA
856 4 $uhttps://link.springer.com/book/10.1007%2F978-3-319-20385-0$zE-book ? Accesso al full-text attraverso riconoscimento IP di Ateneo, proxy e/o Shibboleth
899   $aBIBLIOTECA CENTRO DI SERVIZIO SBA$2VAN15
912   $fN
912   $aVAN00119624
950   $aBIBLIOTECA CENTRO DI SERVIZIO SBA$d15CONS      SBA EBOOK 2949                      $e15EB 2949              20190123            
996   $aDesign for Manufacturability with Advanced Lithography$91756533
997   $aUNICAMPANIA