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001 VAN00027322
005 20240806100335.180
010   $a07-503-0311-5
100   $a20041105d1995       |0itac50      ba
101   $aeng
102   $aUS
105   $a||||    |||||
200 1 $aHandbook of thin film process technology$feditors David A. Glocker, S. Ismat Shah
210   $aBristol$aPhiladelphia$cInstitute of physics$d1995
215   $aXII, 1 v. (paginazione varia)$cill.$d30 cm
620   $dPhiladelphia$3VANL000037
620   $aGB$dBristol$3VANL000183
676   $a621.38152$v21
702  1$aGlocker$bDavid A.$3VANV022734
702  1$aShah$bS. Ismat$3VANV022735
712   $aInstitute of physics <editore>$3VANV108787$4650
801   $aIT$bSOL$c20240906$gRICA
912   $aVAN00027322
950   $aBIBLIOTECA DEL DIPARTIMENTO DI INGEGNERIA$d05PREST     J 197                               $e05   2941              20041105            $sBuono
950   $aBIBLIOTECA DEL DIPARTIMENTO DI INGEGNERIA$d05PREST     J 198                               $e05NS 2941              20240617            
950   $aBIBLIOTECA DEL DIPARTIMENTO DI INGEGNERIA$d05PREST     J 199                               $e05VS 2941              20240617            
996   $aHandbook of thin film process technology$9949847
997   $aUNICAMPANIA