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001 SUN0125711
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010   $d0.00
017 70$2N$a9783319939254
100   $a20191203d2018       |0engc50      ba
101   $aeng
102   $aCH
105   $a||||    |||||
200 1 $a*Metal Impurities in Silicon- and Germanium-Based Technologies$eOrigin, Characterization, Control, and Device Impact$fCor Claeys, Eddy Simoen
205   $aCham : Springer, 2018
210   $aXXXIII$d438 p.$cill. ; 24 cm
215   $aPubblicazione in formato elettronico
410  1$1001SUN0023990$12001 $a*Springer series in materials science$v270$1210  $aBerlin$cSpringer$d1986-.
620   $aCH$dCham$3SUNL001889
676   $a621.36$cIngegneria ottica. Ottica applicata$v22
676   $a620.1$cScienza dei materiali$v22
676   $a541.377$cSemiconduttori$v22
676   $a537.5344$cMicroonde e onde a frequenza ultraalta$v22
700  1$aClaeys$b, Cor$3SUNV097129$0769287
701  1$aSimoen$b, Eddy$3SUNV097130$0769288
712   $aSpringer$3SUNV000178$4650
801   $aIT$bSOL$c20200921$gRICA
856 4 $uhttps://link.springer.com/book/10.1007%2F978-3-319-93925-4#toc
912   $aSUN0125711
950   $aUFFICIO DI BIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHE$d17CONS      e-book                  2112        $e17BIB2112      261     20191203            
996   $aMetal Impurities in Silicon- and Germanium-Based Technologies$91568124
997   $aUNICAMPANIA