LEADER 01513nam0 2200361 i 450 
001 SUN0125375
005 20200408090952.168
010   $d0.00
017 70$2N$a9783319762944
100   $a20191106d2018       |0engc50      ba
101   $aeng
102   $aCH
105   $a||||    |||||
200 1 $a*Physical Design and Mask Synthesis for Directed Self-Assembly Lithography$fSeongbo Shim, Youngsoo Shin
205   $aCham : Springer, 2018
210   $aXIV$d138 p.$cill. ; 24 cm
215   $aPubblicazione in formato elettronico
410  1$1001SUN0123346$12001 $a*NanoScience and Technology$1210  $aBerlin$cSpringer.
620   $aCH$dCham$3SUNL001889
676   $a621.36$cIngegneria ottica. Ottica applicata$v22
676   $a620.5$cNanotecnologia$v22
676   $a621.39$cMicroingegneria$v22
676   $a620.1$cScienza dei materiali$v22
676   $a541.377$cSemiconduttori$v22
700  1$aShim$b, Seongbo$3SUNV096806$0768316
701  1$aShin$b, Youngsoo$3SUNV096807$0768317
712   $aSpringer$3SUNV000178$4650
801   $aIT$bSOL$c20200921$gRICA
856 4 $uhttps://link.springer.com/book/10.1007%2F978-3-319-76294-4#toc
912   $aSUN0125375
950   $aUFFICIO DI BIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHE$d17CONS      e-book                  2112        $e17BIB2112      137     20191106            
996   $aPhysical Design and Mask Synthesis for Directed Self-Assembly Lithography$91564886
997   $aUNICAMPANIA