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010   $d0.00
017 70$2N$a978-3-319-20385-0
100   $a20190123d2016       |0engc50      ba
101   $aeng
102   $aCH
105   $a||||    |||||
200 1 $a*Design for Manufacturability with Advanced Lithography$fBei Yu, David Z. Pan
205   $aCham : Springer, 2016
210   $axi$d164 p. ; 24 cm
215   $aPubblicazione in formato elettronico
620   $aCH$dCham$3SUNL001889
700  1$aYu$b, Bei$3SUNV091871$0788068
701  1$aPan$b, David Z.$3SUNV091872$0788069
712   $aSpringer$3SUNV000178$4650
801   $aIT$bSOL$c20200921$gRICA
856 4 $uhttps://link.springer.com/book/10.1007%2F978-3-319-20385-0
912   $aSUN0119624
950   $aBIBLIOTECA CENTRO DI SERVIZIO SBA$d15CONS      SBA EBOOK 2949                      $e15EB 2949              20190123            
996   $aDesign for Manufacturability with Advanced Lithography$91756533
997   $aUNICAMPANIA