LEADER 01295nam0 2200325 i 450 
001 SUN0109793
005 20170608011550.116
010   $a8-3-662-44394-1$d0.00
017 70$2N$a978-3-662-44395-8
100   $a20170608d2015       |0engc50      ba
101   $aeng
102   $aDE
105   $a||||    |||||
200 1 $a*Micro and Nano Fabrication$eTools and Processes$f Hans H. Gatzen, Volker Saile, Jürg Leuthold$gwith a Foreward and an Introduction by Richard S. Muller
205   $aBerlin : Springer, 2015
210   $aXXVI$d519 p.$cill. ; 24 cm
215   $aPubblicazione in formato elettronico
620   $dBerlin$3SUNL000066
700  1$aGatzen$b, Hans H.$3SUNV084967$0739924
701  1$aSaile$b, Volker$3SUNV084968$0739925
701  1$aLeuthold$b, Jürg$3SUNV084969$0739926
702  1$aMuller$b, Richard S.$3SUNV026484
712   $aSpringer$3SUNV000178$4650
790  1$aGarzen, H. H.$zGatzen, Hans H.$3SUNV107670
801   $aIT$bSOL$c20210503$gRICA
856 4 $uhttps://link.springer.com/book/10.1007%2F978-3-662-44395-8
912   $aSUN0109793
950   $aBIBLIOTECA CENTRO DI SERVIZIO SBA$d15CONS      SBA EBOOK 1386                      $e15EB 1386              20170608            
996   $aMicro and Nano Fabrication$91466147
997   $aUNICAMPANIA