01247nam2 22003133i 450 RMS003426820240906063317.0096167213720091019d1986 ||||0itac50 baengusz01i xxxe z01n˜Vol. 1: œProcess technologyStanley Wolf, Richard N. TauberSunset Beach (Cal.)Lattice pressc1986XXIV, 660 p.ill.25 cm.001RMS00342672001 Silicon processing for the VLSI eraStanley Wolf, Richard N. Tauber1Circuiti integratiFIRNAPC004761I621.3815ELETTRONICA. COMPONENTI E CIRCUITI14621.3815INGEGNERIA ELETTRONICA. COMPONENTI E CIRCUITI22Wolf, Stanley <1943- >MILV1384260708670Tauber, Richard N.RMSV0199180708671ITIT-NA007920091019IT-BN0095 RMS0034268Biblioteca Centralizzata di Ateneov. 1;3v. 1;3 01SALA DING 621.3815 WOL.si 0102 0000007525 B A4(0001 v. 13 1994022319940223 01Process technology1574691UNISANNIO