01356nam0 22003373i 450 PUV097338120250214062634.0047186109X20090713d2001 ||||0itac50 baenggbz01i xxxe z01nMicrosensors, MEMS, and smart devicesJulian W. Gardner, ViJay K. Varadan, Osama O. AwadelkarimChichester [etc.]J. Wileyc2001XVI, 503 p.ill.25 cm.Microsensors, microelectromechanical systems, and smart devicesNAP0591845RivelatoriFIRNAPC073284IElettronicaFIRNAPC032363I621.381INGEGNERIA ELETTRONICA14621.381Ingegneria elettronica22Gardner, Julian W. <1958- >MILV0764330708963Awadelkarim, Osama O.PUVV345200070719343Varadan, Vijay K.RMSV001575070719344ITIT-NA007920090713IT-BN0095 PUV0973381Biblioteca Centralizzata di Ateneo1 v.1 v. 01SALA DING 621.381 GAR.mi 0102 0000043615 B A4 1 v. (rist. 2002)3 2002102920021029 01Microsensors, MEMS, and smart devices1396448UNISANNIO