01604nam0 22003973i 450 NAP065589420251003044257.0978331906616520141001d2014 ||||0itac50 baengchz01i xxxe z01nDesign, modeling and control of nanopositioning systemsAndrew J. Fleming, Kam K. LeangCham [etc.]Springer2014XVI, 411 p.ill.25 cmAdvances in industrial control001MIL02590242001 Advances in industrial controlNanotecnologieFIRUFIC123791ESistemi di controllo automaticiFIRCFIC002887E629.8INGEGNERIA DEI CONTROLLI AUTOMATICI14629.8Ingegneria dei controlli automatici22NanotecnologiaControllo automatico mediante computerNanotecnologieNanotecnologiaSistemi di controllo automaticiControllo automatico mediante computerFleming, Andrew J. <1977- >RMSV469655070764863Leang, Kam K.NAPV161674070764864ITIT-00000020141001IT-BN0095 NAP 01SALA DING $NAP0655894Biblioteca Centralizzata di Ateneo1 v. 01SALA DING 629.8 FLE.de 0102 0000098685 VMA A4 1 v.B 2014093020141001 01Design, modeling and control of nanopositioning systems1553769UNISANNIO