01462nam0 22003493i 450 NAP047245820240906063120.0084933928620091019d2006 ||||0itac50 baengusz01i xxxe z01nX-ray metrology in semiconductor manufacturingD. Keith Bowen, Brian K. TannerBoca Raton [etc.]CRCTaylor & Francis2006279 p.ill.25 cm.SemiconduttoriFIRNAPC093696IRaggi XDiffrazioneFIRNAPC270203E621.3815ELETTRONICA. COMPONENTI E CIRCUITI14621.38152Elettronica. Componenti e circuiti. Semiconduttori22Bowen, David Keith <1940- >NAPV112650070771023Tanner, Brian K.MILV19314507053806Tanner, Brian KeithSBNV068371Tanner, Brian K.Bowen, D. KeithNAPV112651Bowen, David Keith <1940- >Bowen, D. K.SBNV033730Bowen, David Keith <1940- >ITIT-NA007920091019IT-BN0095 NAP0472458Biblioteca Centralizzata di Ateneo1 v.1 v. 01SALA DING 621.3815 BOW.xr 0102 0000060835 B A4 1 v.3 2007011020070110 01X-ray metrology in semiconductor manufacturing1573358UNISANNIO