01154nam0 22003253i 450 NAP046734520251003044252.00824723058978082472305720090714d2006 ||||0itac50 baengusz01i xxxe z01nMicroengineering, MEMS, and interfacinga practical guideDanny BanksBoca Raton [etc.]CRC pressTaylor & Francis2006326 p.ill.24 cm.Mechanical engineering199001MIL00589472001 Mechanical engineering199621FISICA APPLICATA14621FISICA APPLICATA22Banks, DannyNAPV111501070720528ITIT-00000020090714IT-BN0095 NAP 01SALA DING $NAP0467345Biblioteca Centralizzata di Ateneo1 v. 01SALA DING 621 BAN.mi 0102 0000060865 VMA A4 1 v.Y 2007011020070110 01Microengineering, MEMS, and interfacing1400246UNISANNIO