01139nam0 22003253i 450 MIL055048920240906063041.00125249756978012524975120090423d2002 ||||0itac50 baengusz01i xxxe z01nz02nMaterials science of thin filmsdeposition and structureMilton Ohring2. edSan Diego [etc.]Academic press2002XXI, 794 p.ill.24 cmFilm sottiliFIRNAPC279429N530.4Fisica. Stati della materia14530.4275FISICA SUPERFICIALE. Film sottili22Ohring, Milton <1936- >MILV097009070462774ITIT-NA007920090423IT-BN0095 MIL0550489Biblioteca Centralizzata di Ateneo1 v.1 v. 01RICERCA 530.4 OHR.ma 0102 0000054505 N A4 1 v.3 2004052720040527 01Materials science of thin films188399UNISANNIO