01093nam a22003255i 4500991003428209707536171114s2017 nyu 000 0 eng d9783319393612 b14331809-39ule_instBibl. Dip.le Aggr. Matematica e Fisica - Sez. Fisicaeng620.523LC T174.762(083)Cui, Zheng471692Nanofabrication :principles, capabilities, and limits /Zheng Cui2nd edCham :Springer,2017xvii, 432 p. :ill. ;25 cmIncludes bibliographical references and indexNanotechnologyEngineeringOpticsElectrodynamicsContinuum mechanics.b1433180926-02-1801-12-17991003428209707536LE006 53.8 CUI12006000100311le006pE130.89-n- 10070.i1583640x26-02-18Nanofabrication229512UNISALENTOle00614-11-17ma -engnyu00