01159cam a2200289 i 4500991003427979707536171114t20132013nyu b 001 0 eng d9780199861224b14331731-39ule_instBibl. Dip.le Aggr. Matematica e Fisica - Sez. Fisicaeng621.3815/223LC TK7871.85621.3.2.4Campbell, Stephen A.530264Fabrication engineering at the micro- and nanoscale /Stephen A. CampbellFourth editionNew York :Oxford University Press,[2013]xiv, 671 pages;24 cmThe Oxford series in electrical and computer engineeringIncludes bibliographical references and indexSemiconductorsDesign and construction.b1433173114-03-1830-11-17991003427979707536LE006 621.3.2 CAM12006000179294le006pE150.00-no 10010.i1583927814-03-18Fabrication engineering at the micro- and nanoscale1495183UNISALENTOle00614-11-17ma engnyu00