01075nam a2200313 i 450099100307827970753620021122115229.0020220s2000 us ||| | eng 0471330019197000b11751514-39ule_instLE00646226ExLDip.to Fisicaita53.7.853.8.3671.7'35TS695.M32Mahan, John E.530349Physical vapor deposition of thin films /John E. MahanNew York :John Wiley & Sons,c2000xiii, 312 p. :ill. (some col.) ;24 cm.Includes bibliographical references and index.Thin filmsVapor-plating.b1175151421-09-0622-11-02991003078279707536LE006 53.7.8+53.8.3 MAH12006000085090le006-E0.00-l- 00000.i1199415022-11-02Physical vapor deposition of thin films904543UNISALENTOle00601-01-02ma -engus 01