01066nam a2200265 i 450099100306679970753620021031120610.0020528s1996 us ||| | eng 0195105087Lire 215.300b11749763-39ule_instLE02615115ExLDip.to Ingegneria dell'Innovazioneita621.38152Campbell, Stephen A.530264The science and engineering of microelectronic fabrication /Stephen A. CampbellNew York ; Oxford :Oxford University Press,1996xv, 536 p. :ill ;24 cmThe oxford series in electrical engineeringSemiconduttori - Tecnologia.b1174976321-09-0605-11-02991003066799707536LE026 621.38152 CAM 01.01 199612026000012599le026pE0.00-l- 44240.i1198977405-11-02Science and engineering of microelectronic fabrication905560UNISALENTOle02601-01-02ma -engus 41