01428nas a2200289 i 450099100266754970753620231109125731.0011205m19919999 || | |eng 1071-1023b11691335-39ule_instPERLE004978ExLCDU 62Journal of vacuum science & technology. B :Microelectronics and nanometer structures. Processing, measurement and phenomenaJournal of vacuum science & technology. B :Microelectronics and nanometer structures. Processing, measurement and phenomena /American Vacuum Society. - 1991-New York,1991-Pubblicato anche in formato elettronico.LE006 1991-2008;American Vacuum Societyauthorhttp://id.loc.gov/vocabulary/relators/aut316246Journal of vacuum science & technology. BMicroelectronics processing and phenomenahttp://avspublications.org/jvstb/resource/1/jvtbd9E-journal (Publisher Site).b1169133525-11-1408-07-02991002667549707536LE0061le006-E0.00-no 180000.i1192160208-07-02LE006Vol. 26 (2008)1le006pE649.34n- 180000.i1564563025-11-14Journal of vacuum science & technology. B1453160UNISALENTOle00601-01-01sa -engxx 01