01023nam a2200265 i 4500991001755899707536080604s2004 enka b 001 0 eng d0863413358b14065204-39ule_inst621.38121MEMS packaging /edited by Tai-Ran HsuLondon :Institution of Electrical Engineers,c2004xxix, 275 p. :ill. ;25 cmEMIS processing series ;no. 3Includes bibliographical references and indexMicroelectromechanical systemsMicroelectronic packagingHsu, Tai-RanInstitution of Electrical Engineers.b1406520428-01-1415-06-12991001755899707536LE026 621.381 HSU 01.01 200412026000061160le026Prof. Catarinucci / BibliotecapE102.77-l- 42020.i1542315315-06-12MEMS packaging239792UNISALENTOle02604-06-08ma -engenk00