01002nam a2200301 i 450099100124009970753620020507113306.0970308s1983 us ||| | eng b10193042-39ule_instLE00644486ExLDip.to Fisicaita53.753.8621.381'73TK7871.15Murarka, Shyam P.463885Silicides for VLSI applications /S.P. MurarkaOrlando :Academic Press,1983xi, 200 p. ;24 cm.Electronics-MaterialsIntegrated circuits-Very large scale integrationSilicides.b1019304221-09-0627-06-02991001240099707536LE006 53.7+53.8 MUR12006000098052le006-E0.00-l- 00000.i1023817727-06-02Silicides for VLSI applications191741UNISALENTOle00601-01-97ma -engus 01