01290nam a2200313 i 450099100123643970753620020507113240.0970308s1988 us ||| | eng 0815511507b10192554-39ule_instLE00644403ExLDip.to Fisicaita53(022)53.8.2253.9.1TK7874McGuire, Gary E.27694Semiconductor materials and process technology handbook :for very large scale integration (VLSI) and ultra large scale integration (ULSI) /edited by Gary E. McGuirePark Ridge, N.J :Noyes Publications,1988xiii, 675 p. :ill. ;25 cm.Materials science and process technology seriesIncludes bibliographies and index.Integrated circuits-Very large scale integration-Design and construction Handbooks, manuals, etc..b1019255417-02-1727-06-02991001236439707536LE006 53.9.1 MCG12006000084895le006-E0.00-l- 03030.i1023756227-06-02Semiconductor materials and process technology handbook191725UNISALENTOle00601-01-97ma -engus 01