01096nam a2200313 i 450099100118689970753620020507112419.0970308s1970 us ||| | eng b10185732-39ule_instLE00643597ExLDip.to Fisicaita53.7.18539.7'21QC793.3Johnson, William S.463556Projected range statistics in semiconductors /by William S. Johnson and James F. GibbonsStanford, CA :Stanford University Press,19701 v. ;28 cm.Ion bombardmentIon implantationParticle range (Nuclear physics)SemiconductorsGibbons, James F..b1018573221-09-0627-06-02991001186899707536LE006 53.7.18 JOH12006000058971le006-E0.00-l- 00000.i1022847027-06-02Projected range statistics in semiconductors190464UNISALENTOle00601-01-97ma -engus 01