01445nam a2200337 i 450099100104495970753620020507105616.0990531s1998 de ||| | eng 354063973Xb10165721-39ule_instLE00641205ExLDip.to Fisicaita53.2.65621.3815'2'028TK7836.M467Metev, Simeon M.462629Laser-assisted microtechnology /Simeon M. Metev and Vadim P. Veiko2nd upd. ed.Berlin :Springer-Verlag,1998xii, 270 p. :ill. ;24 cm.Springer series in materials science ;19Includes bibliographical references and index.Electronic industries-Technological innovationsVeiko, Vadim P.authorhttp://id.loc.gov/vocabulary/relators/aut733195.b1016572117-02-1727-06-02991001044959707536LE006 53.2.65 MET12006000079013le006Copia sostitutiva di originale smarrito reintegrata dall'utente Maurizio Martino su supporto elettronico.nE0.00-lm 00000.i1020205527-06-02LE006 53.2.65 MET22006000079389le006-E0.00-l- 01010.i1020206727-06-02Laser-assisted microtechnology1444915UNISALENTOle00601-01-99ma -engde 02