01282nam a2200337 i 450099100103756970753620020507105448.0010126s1970 us ||| | eng 0124808506b10164704-39ule_instLE00641086ExLDip.to Fisicaita53.7.18621.3.2.4621.381'52TK7871.85Eriksson, Lennart49151Ion implantation in semiconductors, silicon and germanium /[by] James W. Mayer, Lennart Eriksson and John A. DaviesNew York :Academic Press,1970xiii, 280 p. :ill. ;24 cm.Includes bibliographical references.Ion implantationSemiconductorsDavies, John Arthur.b1016470421-09-0627-06-02991001037569707536LE006 53.7.18 MAY12006000058933le006-E0.00-l- 01010.i1020042327-06-02LE006 53.7.18 MAY22006000171960le006-E0.00-l- 00000.i1020043527-06-02Ion implantation in semiconductors, silicon and germanium188891UNISALENTOle00601-01-01ma -engus 02