01109nam a2200313 i 450099100103723970753620020507105445.0960420s1989 us ||| | eng 1558990208b10164650-39ule_instLE00641081ExLDip.to Fisicaita53.7.1853.853.9.1MRS462574Ion beam processing of advanced electronic materials :MRS Symposium Proceedings /edited by N.W. Cheung, A.D. Marwick, J.B. RobertoPittsburgh :Materials Research Society,19891 v. :ill.MRS Symposium Proceedings ;147Cheung, N.W.Marwick, A.D.Roberto, J.B..b1016465017-02-1727-06-02991001037239707536LE006 53.9.1 CHE12006000056922le006-E0.00-l- 00000.i1020037x27-06-02Ion beam processing of advanced electronic materials188884UNISALENTOle00601-01-96ma -engus 01