01061nam a2200265 i 450099100100861970753620020507105056.0970307s1967 us ||| | eng b10160838-39ule_instLE00640591ExLDip.to Fisicaita621.3.2.5621.381'73TK7874Integrated circuit engineering Corporation 462420Integrated circuit fabrication facilities :an evaluation of their use, size and installation requirements /prepared by Integrated Circuit Engineering CorporationPhoenix :ICE Corporation,19671 v. ;28 cm.Integrated circuits-Design and construction.b1016083821-09-0627-06-02991001008619707536LE006 621.3.2 ICE12006000053846le006-E0.00-l- 00000.i1019504x27-06-02Integrated circuit fabrication facilities188563UNISALENTOle00601-01-97ma -engus 01