01193nam a2200265 i 4500991000954709707536050322s2003 flua b 001 0 eng d1584883065 b13298355-39ule_instDip.to Ingegneria dell'Innovazioneeng621.3Pelesko, John A.622153Modeling MEMS and NEMS /John A. Pelesko and David H. BernsteinBoca Raton, FL :Chapman & Hall/CRC,2003xxiii, 357 p. :ill. ; 24 cmIncludes bibliographical references and indexMicroelectromechanical systemsMathematical modelsBernstein, David H..b1329835521-09-0611-04-05991000954709707536LE026 621.3 PEL 01.01 C.1 2003C.112026000023236le026Prof. Laforgia / BibliotecapE59.90-l- 43030.i1406703112-05-05LE026 621.3 PEL 01.01 C.2 2003C.212026000024257le026Prof. Laforgia / BibliotecapE61.04-l- 45150.i1412313707-09-05Modeling MEMS and NEMS1104931UNISALENTOle02622-03-05ma -engflu00