01356nam a2200337 i 450099100093773970753620020507104117.0980923s1997 us ||| | eng 081942403Xb10150742-39ule_instLE00639427ExLDip.to Fisicaita53.2.63621.36'6TA1695.E9348SPIE Meeting on excimer lasers, optics, and applications461964Excimer lasers, optics, and applications :12-13 February 1997, San José, CA /Harry Shields, Peter E. Dyer (eds.) ; sponsored by the International Society for Optical EngineeringBellingham :SPIE,1997vii, 160 p. :ill. ;28 cm.SPIE Proceedings ;2992Includes bibliographical references and index.Excimer lasersCongressesShields, Harryauthorhttp://id.loc.gov/vocabulary/relators/aut733163Dyer, Peter E.SPIE.b1015074217-02-1727-06-02991000937739707536LE006 53.2.63 SHI12006000070256le006-E0.00-l- 00000.i1018062x27-06-02Excimer lasers, optics, and applications1444816UNISALENTOle00601-01-98ma -engus 01