01219nam a2200337 i 450099100093769970753620020507104117.0970308s1987 us ||| | eng 0892527455b10150730-39ule_instLE00639426ExLDip.to Fisicaita53(082.2)53.2.63621.36'63TA1695.E934SPIE Meeting on excimer lasers and optics461963Excimer lasers and optics :18-19 September 1986, Cambridge, MA /edited by Ting Shan Luk ; sponsored by the International Society for Optical EngineeringBellingham :SPIE,1987vi, 150 p. :ill. ;28 cm.SPIE Proceedings ;710Includes bibliography and index.Excimer lasersCongressesLuk, Ting ShanSPIE.b1015073017-02-1727-06-02991000937699707536LE006 53.2.63 LUK12006000046350le006-E0.00-l- 00000.i1018061827-06-02Excimer lasers and optics187791UNISALENTOle00601-01-97ma -engus 01