01053nam a2200313 i 450099100093730970753620020507104113.0970307s1988 us ||| | eng 0819400335b10150675-39ule_instLE00639420ExLDip.to Fisicaita53(082.2)53.2.6353.2.6553.2.68SPIE461958Excimer beam applications :proc. SPIE (6 September 1988 Boston, Massachusetts) /Anthony N.Pirri, Bernhard P.Piwczyk (editors)Bellingham :SPIE,c1988vi, 128 p.SPIE Proceedings ;998Pirri, A.N.Piwczyk, Bernhard P..b1015067517-02-1727-06-02991000937309707536LE006 53.2.63 PIR12006000046527le006-E0.00-l- 00000.i1018054027-06-02Excimer beam applications187793UNISALENTOle00601-01-97ma -engus 01