01033nam a2200301 i 450099100085571970753620020507102347.0931005s1991 us ||| | eng 0442319509b10139059-39ule_instLE00637997ExLDip.to Fisicaita621.3.4696TH7694.K69Kozicki, Michael N.461368Cleanrooms :facilities and practices /by Michael N. Kozicki, Stuart A. Hoenig, and Patrick J. RobinsonNew York :Van Nostrand Reinhold Co.,c1991x, 374 p. ;24 cm.Clean roomsHoenig, Stuart A.Robinson, Patrick J..b1013905921-09-0627-06-02991000855719707536LE006 621.3.4+621.3.5 KOZ12006000052580le006-E0.00-l- 00000.i1016500927-06-02Cleanrooms186779UNISALENTOle00601-01-93ma -engus 01