01276nam a2200325 i 450099100080036970753620020506123903.0970307s1987 us ||| | eng 089252832Xb1013136x-39ule_instLE00637061ExLDip.to Fisicaita53(082.2)53.2.65621.3815TK7871.85SPIE Conference on advanced processing of semiconductor devices460996Advanced processing of semiconductor devices :proceedings of SPIE (23-25 March, 1987, Bay Point, Florida) /Sayan D. Mukherjee (ed.)Bellingham :SPIE,c1987x, 362 p. :ill. ;28 cm.SPIE Proceedings ;797Semiconductors-Design and constructionCongressesMukherjee, Sayan D.authorhttp://id.loc.gov/vocabulary/relators/aut733119SPIE.b1013136x17-02-1727-06-02991000800369707536LE006 53.2.65 MUK12006000011556le006-E0.00-l- 00000.i1015365227-06-02Advanced processing of semiconductor devices1444707UNISALENTOle00601-01-97ma -engus 01