01120nam a2200265 i 450099100015837970753620020506105755.0000703s1988 us ||| | eng 0883183676b10038772-39ule_instLE02614170ExLDip.to Ingegneria dell'Innovazioneita621.38152Rubloff, G.W.459929Deposition and growth :limits for microelectronics, Anaheim, CA 1987 /editor G.W. RubloffNew York :American Institute of physics,1988388, [8] p. :ill. ;25 cmAmerican institute of physics conference proceedings ; 167. American vacuum society series ;4Microelettronica - Semiconduttori - Tecnologia di crescita e deposizione.b1003877217-02-1731-05-02991000158379707536LE026 621.38152 RUB 01.01 198812026000009834le026-E0.00-l- 40000.i1004289131-05-02Deposition and growth177214UNISALENTOle02601-01-00ma -engus 01