01256nam a2200301 i 450099100015515970753620020506105702.0000615s1993 us ||| | eng 1558991778b10038310-39ule_instLE02614094ExLDip.to Ingegneria dell'Innovazioneita621.381Abernathy, C.R.459921Chemical perspectives of microelectronic materials III :symposium held november 30-december 3, 1992, Boston, Massachussetts, Usa /editors :C.R.Abernathy ... [ et al.]Pittsburgh :Materials Research Society,c 1993xv, 727 p. :ill. ;24 cm.Materials research society symposium proceedings ;v. 282Elettronica - Materiali - TecnologiaCongressiBates, C.W.Bohling, D.A.Hobson, W.S..b1003831017-02-1731-05-02991000155159707536LE026 621.381 ABE 01.01 199312026000009667le026-E0.00-n- 00000.i1004213131-05-02Chemical perspectives of microelectronic materials III177340UNISALENTOle02601-01-00ma -engus 01