02794nam a2200313 i 4500991000092119707536080711s2004 ne a b 001 0 eng d9781402029271b13813237-39ule_instDip.to Ingegneria dell'Innovazioneeng621.38121NATO Advanced Study Institute on Smart Sensors and MEMS(2003 :Pâovoa de Varzim, Portugal)629748Smart sensors and MEMS :[proceedings of the NATO Advanced Study Institute on smart sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003] /edited by Sergey Y. Yurish and Maria Teresa S.R. GomesDordrecht ;Boston :Kluwer Academic,c2004xv, 480 p. :ill. ;24 cmNATO science series.Series II,Mathematics, physics, and chemistry ;v. 181Includes bibliographical references and indexSmart sensors for electrical and non-electrical, physical and chemical variables: state-of-the-art / Sergey Y. Yurish -- Novel conversion methods for self-adaptive smart sensors / Sergey Y. Yurish and Nikolay V. Kirianaki -- Resonant piezoelectric devices as physical and biochemical sensors / Fabien Josse and Richard W. Cernosek -- Acoustic-wave piezoelectric and pyroelectric sensor based on PZT thick films / Vittorio Ferrari -- Wireless passive SAW identification marks and sensors / Elke Mackensen and Leonhard Reindl -- Precise vectorial magnetic sensors / Pavel Ripka -- Micro-hall magnetic sensors: physical, technologies and applications / Radivoje S. Popovic, Giovanni Boero, and Pierre-Andre Besse -- Modern silicon-based MEMS technology / Ulrich Mescheder -- Porous silicon: technology and applications for micromachining and MEMS / Ulrich Mescheder -- Thermal design of microelectronics system / Dmytro Fedasyuk and Volodymyr Makar -- Chemical and biological sensors based on microcantilevers / P.G. Datskos, N.V. Lavrik and M.J. Sepaniak -- Uncooled infrared MEMS detectors / P.G. Datskos and N.V. Lavrik -- Bulk acoustic wave sensors in chemical analysis / Maria Teresa S. R. Gomes -- Electronic biosensors based on biomaterial-nanoparticle hybrid systems / Eugenii KatzDetectorsTechnological innovationsCongressesMicroelectromechanical systemsCongressesScanning systemsCongressesYurish, Sergey Y.Gomes, Maria Teresa S. R..b1381323702-04-1425-02-09991000092119707536LE026 621.381 YUR 01.01 200412026000044323le026Prof. Tarricone / BibliotecapE207.00-l- 46160.i1493595827-02-09Smart sensors and MEMS1225782UNISALENTOle02611-07-08ma -engne 00