01238nam 2200337 450 99657528040331620230807201631.0617-607-808-3(CKB)4100000007802873(WaSeSS)IndRDA00120214(EXLCZ)99410000000780287320200312d2015 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2015 XI International Conference on Perspective Technologies and Methods in MEMS Design 2-6 September 2015, Lviv, Ukraine /sponsored by IEEE Ukraine SectionPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2015.1 online resource (71 pages)1-4673-7137-8 Microelectromechanical systemsDesign and constructionCongressesMicroelectromechanical systemsDesign and construction621.381IEEE.Ukraine Section,WaSeSSWaSeSSPROCEEDING9965752804033162015 XI International Conference on Perspective Technologies and Methods in MEMS Design2541774UNISA