01798nam 2200373 450 99657500200331620230422131729.01-66549-487-5(CKB)5680000000053315(NjHacI)995680000000053315(EXLCZ)99568000000005331520230422d2022 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :IEEE,2022.1 online resource1-66549-488-3 ASMC is the leading international technical conference for exploring solutions to improve the collective microelectronics manufacturing expertise Solving the challenges presented by semiconductor manufacturing is an ongoing collaborative effort by customers, device makers, equipment and materials suppliers, and academia The conference provides an unparalleled platform for semiconductor professionals to network and learn the latest information in the practical application of advanced manufacturing strategies and methodologies.2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference SemiconductorsDesign and constructionCongressesSemiconductor industryCongressesSemiconductorsDesign and constructionSemiconductor industry621.3815NjHacINjHaclPROCEEDING9965750020033162022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)3880175UNISA