01983nam 2200397 450 99657458560331620230613165023.01-7281-1629-5(CKB)4920000000250650(NjHacI)994920000000250650(EXLCZ)99492000000025065020230613d2019 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) April 11-14, 2019, Bangkok, Thailand /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :IEEE,2019.1 online resource illustrations1-7281-1630-9 Micro Nano Electro Mechanical Systems (M NEMS) Micro Nano Molecular Fabrication Nanomaterials Nonmaterial Based Devices and Systems Nanophotonics and Nanoscale Imaging Nanoscale Robotics, Assembly, and Automation Molecular Sensors, Actuators, and Systems Micro Nano Fluidics Micro Nano Mechanics Nanobiology Nanomedicine Nano Energy, Micro Energy Harvesting, Energy Materials Flexible Soft Materials, Sensors and Actuators Micro Nanotechnology in Neural Prostheses Micro Nano Lens and Nanoscale Imaging Nanophotonics and Microoptics 2D Nanomaterials Plasmonic and Metamaterials Others.2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems MicrotechnologyCongressesMicroelectromechanical systemsCongressesNanoelectromechanical systemsCongressesMicrotechnologyMicroelectromechanical systemsNanoelectromechanical systems621.381NjHacINjHaclPROCEEDING9965745856033162019 IEEE 14th International Conference on Nano2545158UNISA