00789nam 2200277 450 99655227030331620231019112635.0978-3-662-50008-820231018d2015----km y0itay5003 baengDEa a 001 yHandbook of thin-film technologyeditors Hartmut Frey, Hamid R. KhanBerlin HeidelbergSpringer-Verlag2015XIII, 379 p.ill.25 cm.Film sottiliBNCF530.4275FREY,HartmutKHAN,Hamid R.ITcbaREICAT996552270303316530.427 HAN 141404 Sci.530.427544617BKSCIHandbook of thin film technology187353UNISA