01257nam 2200337Ia 450 99638466930331620200818213730.0(CKB)4940000000068664(EEBO)2240926212(UnM)99897857(UnM)9928936300971(EXLCZ)99494000000006866419990126d1671 uy |engurbn||||a|bb|Euphrates, or the waters of the east[electronic resource] being a short discourse of that secret fountain, whose water flows from fire; and carries in it the beams of the sun and moon. By Eugenius PhilalethesLondon printed for Robert Boulter, at the Turks-head in Cornhill, over against the Royall Exchange1671[16], 124 pEugenius Philalethes = Thomas Vaughan.The first leaf is blank.Reproduction of original in the Glasgow University Library.eebo-0166Euphrates RiverEarly works to 1800Vaughan Thomas1622-1666.1003227Cu-RivESCu-RivESWaOLNBOOK996384669303316Euphrates, or the waters of the east2404772UNISA03718nam 22006615 450 991052296480332120251113173939.03-030-79749-X10.1007/978-3-030-79749-2(CKB)5100000000044194(MiAaPQ)EBC6767926(Au-PeEL)EBL6767926(OCoLC)1281985431(PPN)258301988(DE-He213)978-3-030-79749-2(EXLCZ)99510000000004419420211012d2022 u| 0engurcnu||||||||txtrdacontentcrdamediacrrdacarrierAdvanced MEMS/NEMS Fabrication and Sensors /edited by Zhuoqing Yang1st ed. 2022.Cham :Springer International Publishing :Imprint: Springer,2022.1 online resource (312 pages)Engineering Series3-030-79748-1 Tip-based Nanofabrication for MEMS Devices -- 1D-Nanostructured Piezoresistive Microcantilever for Environmental Sensing -- Application of Non-template Special Nanostructure Fabrication Technology in Sensors -- Composite Micro-machining Technology on the Non-silicon MEMS -- Nano-in-Nano Integration for Nanofluidics -- Bionanoscaffolds-enabled Micro/Nanofabrication and Devices -- NEMS Sensors Based on Novel Nanomaterials -- Microfluidic Sensors in Surface Channel Technology -- MOEMS-enabled Miniaturized Biomedical Sensing and Imaging System -- Bio-inspired Flexible Sensors for Flow Field Detection -- Ultrasound MEMS for Biosensing and Biomedical Imaging -- Optofluidic Devices for Bio-analytical Applications.This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.Engineering SeriesMicrotechnologyMicroelectromechanical systemsElectronicsCooperating objects (Computer systems)MaterialsMicrosystems and MEMSElectronics and Microelectronics, InstrumentationCyber-Physical SystemsMaterials EngineeringMicrotechnology.Microelectromechanical systems.Electronics.Cooperating objects (Computer systems)Materials.Microsystems and MEMS.Electronics and Microelectronics, Instrumentation.Cyber-Physical Systems.Materials Engineering.621.381Yang ZhuoqingMiAaPQMiAaPQMiAaPQBOOK9910522964803321Advanced MEMS2595226UNINA