01292nas 2200421- 450 99633661270331620180921043344.1(OCoLC)780067003(CKB)2480000000004073(CONSER)--2013252410(DE-599)ZDB2695455-2(MiAaPQ)986351(EXLCZ)99248000000000407320110209a20069999 s-- -engur|||||||||||txtrdacontentcrdamediacrrdacarrierJournal of laser micro/nanoengineering JLMNOsaka, Japan :Japan Laser Processing Society,2006-1 online resourceRefereed/Peer-reviewed1880-0688 NanotechnologyPeriodicalsLasers in engineeringPeriodicalsLasers in engineeringfast(OCoLC)fst00992892Nanotechnologyfast(OCoLC)fst01032639Periodicals.fastNanotechnologyLasers in engineeringLasers in engineering.Nanotechnology.Japan Laser Processing Society.JOURNAL996336612703316Journal of laser micro2097952UNISA