01926nas 2200601-a 450 99633434990331620240112213020.01932-5134(DE-599)ZDB2088795-4(OCoLC)70631822(CKB)1000000000289610(CONSER)--2006214568(EXLCZ)99100000000028961020060719a20079999 --- aengur|||||||||||txtrdacontentcrdamediacrrdacarrierJournal of micro/nanolithography, MEMS, and MOEMS JM³[Bellingham, WA] SPIE-The International Society of Optical Engineering©2007-Refereed/Peer-reviewed1932-5150 JM³J. Micro/Nanolith. MEMS MOEMSJ. MICRO/NANOLITHOGR. MEMS MOEMSJ MICRO-NANOLITH MEMNANOLITH MEMJ. MICRO-NANOLITHOGR. MEMS MOEMSJ. Micro/Nanolith. MEMS MOEMSNanolithographyPeriodicalsMicroelectronicsPeriodicalsMicrolithographyPeriodicalsMicrofabricationPeriodicalsMicroelectronicsfast(OCoLC)fst01019757Microfabricationfast(OCoLC)fst01019807Microlithographyfast(OCoLC)fst01019883Nanolithographyfast(OCoLC)fst01894717Periodicals.fastNanolithographyMicroelectronicsMicrolithographyMicrofabricationMicroelectronics.Microfabrication.Microlithography.Nanolithography.620Society of Photo-Optical Instrumentation Engineers.JOURNAL996334349903316Journal of micro2409405UNISA