01238nas 2200445- 450 99632102630331620240322172740.02590-0072(DE-599)ZDB2965612-6(OCoLC)1082523444(CKB)4100000007106616(CONSER)--2024204002(EXLCZ)99410000000710661620190117a20189999 --- aengur|||||||||||txtrdacontentcrdamediacrrdacarrierMicro and nano engineering[Amsterdam] :Elsevier B.V.,2018-online resourceMNEMicrotechnologyPeriodicalsNanotechnologyPeriodicalsMicrotechnologyfastNanotechnologyfastPeriodicalPeriodicalsfastPeriodicals.lcgftMicrotechnologyNanotechnologyMicrotechnologyNanotechnology620International Micro and Nano Engineering Society,JOURNAL996321026303316Micro and nano engineering1892722UNISA