01024nam 2200301 450 99631304940331620180302201610.0(CKB)1000000000711356(WaSeSS)IndRDA00093334(EXLCZ)99100000000071135620180302d2008 || |engur|||||||||||txtrdacontentcrdamediacrrdacarrier2008 International Conference on Perspective Technologies and Methods in MEMS Design 21-24 May 2008New York :IEEE,2008.1 online resource (144 pages)966-2191-00-3 Microelectromechanical systemsDesign and constructionCongressesMicroelectromechanical systemsDesign and constructionWaSeSSWaSeSSPROCEEDING9963130494033162008 International Conference on Perspective Technologies and Methods in MEMS Design2545935UNISA