01042nam 2200337 450 99628088320331620180316090927.01-5386-4719-2(CKB)4100000001590490(WaSeSS)IndRDA00095186(EXLCZ)99410000000159049020180316d2018 || |engur|||||||||||txtrdacontentcrdamediacrrdacarrierIMPACT 2017 12th International Microsystems, Packaging, Assembly and Circuits Technology Conference : 25-27 October 2017New York :IEEE,2018.1 online resource (159 pages)1-5386-4720-6 Microelectromechanical systemsCongressesMicroelectronic packagingCongressesMicroelectromechanical systemsMicroelectronic packagingWaSeSSWaSeSSPROCEEDING996280883203316Impact977235UNISA