00736oam 2200217z- 450 9962808443033161-4799-0762-6(CKB)3390000000045204(EXLCZ)99339000000004520420220628c2013uuuu -u- -engMicro/Nanotechnologies and Electron Devices (EDM), 2013 14th International Conference of Young Specialists onIEEE1-4799-0763-4 1-4799-0761-8 2013 14th International Conference of Young Specialists on Micro/Nanotechnologies and Electron DevicesMicro/Nanotechnologies and Electron Devices PROCEEDING996280844303316Micro764900UNISA