01255nam 2200361 450 99628070800331620230814223118.01-5386-0455-8(CKB)4100000005061457(WaSeSS)IndRDA00122323(EXLCZ)99410000000506145720200424d2018 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2018 IEEE International Vacuum Electronics Conference 24-26 April 2018, Monterey, CA, USA /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2018.1 online resource (252 pages)1-5386-0456-6 Vacuum technologyCongressesElectronic apparatus and appliancesCongressesVacuum technologyElectronic apparatus and appliances621.55Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSPROCEEDING9962807080033162018 IEEE International Vacuum Electronics Conference2533576UNISA